Helios 5 DualBeam – advanced (S)TEM imaging: quotation, request for quotation, price and purchase

Building on the high-performance imaging and analysis capabilities of the industry-leading Helios DualBeam family, Thermo Scientific has introduced Helios 5 DualBeam. It has been carefully designed to meet the requirements of materials science researchers and engineers in a variety of focused ion beam scanning electron microscopy (FIB-SEM) use cases, even on the most challenging samples.

Helios 5 DualBeam redefines the standard for high resolution imaging with high material contrast; easy, fast, precise and high-quality sample preparation for S/TEM imaging and atom probe tomography (APT); and high-quality subsurface and 3D characterization.

Additional enhancements have been made to the new Helios 5 DualBeam to ensure the system is optimized for a range of manual or automated workflows, building on the established capabilities of the Helios DualBeam family. Among these improvements are:

  • Greater ease of use: For operators of all skill levels, Helios 5 DualBeam is the most user-friendly DualBeam solution yet. Months of operator training can be reduced to a few days. All operators would benefit from a system design that enables reliable, repeatable results across a wide range of complex applications.
  • Increased Productivity: By enabling unattended and even overnight operation, the improved automation capabilities, increased reliability and stability of Thermo Scientific AutoTEM 5 and Helios 5 DualBeam software can significantly increase sample preparation efficiency.
  • Faster time to results: FLASH technology is now available in Helios 5 DualBeam, providing an innovative approach to image tuning. With traditional microscopes, the microscope must be precisely adjusted through repeated alignment each time the user wants to capture an image. With Helios 5 DualBeam, a simple gesture on the screen activates FLASH. This will automatically modify these parameters. Automatic modifications can significantly increase data quality, improve throughput, and simplify the process of obtaining high-quality images.

S/TEM sample preparation

The fifth generation of the industry-leading Helios DualBeam family includes the Thermo Scientific Helios 5 DualBeam. It has been carefully crafted to meet the demands of scientists and engineers, combining the excellent Thermo Scientific Tomahawk ion column for fast, simple and accurate preparation of high-quality samples with a state-of-the-art Elstar electron column for extremely high resolution imaging.

Helios 5 DualBeam is equipped with a suite of cutting-edge technologies, including advanced electron and ion optics, to facilitate consistent and easy preparation of high-resolution S/TEM and atomic tomography (APT) samples. This allows for high-quality subsurface and three-dimensional characterization, even of the most difficult samples.

Key features

Preparation of high-quality samples

Site-specific sample preparation for S/TEM and APT analyzes using the industry-leading Thermo Scientific Phoenix low-voltage ion column or Thermo Scientific Tomahawk high-throughput ion column.

The shortest time to obtain information at the nanoscale

Utilizing the best-in-class Thermo Scientific Elstar electron column with FLASH and SmartAlign technologies, this column is suitable for users of all experience levels.

Full sample information

The contrast obtained from up to six integrated detectors positioned in the column and under the lens is sharp, refined and free.

Rapid nanoprototyping

Accurate, precise and fast milling and deposition of complex structures with critical dimensions below 10 nm.

Artifact-free imaging

Powered by integrated sample purity management and specialized imaging modes such as DCFI and SmartScan modes.

Completely automatic

AutoTEM 5 software is an optional tool that enables fast, simple, fully automated, unattended, multi-site operation at location AND ex situ TEM sample preparation and sections.

New generation UC+ monochromator technology

Thanks to the new generation of UC+ monochromator technology, which features higher current and can achieve sub-nanometer efficiency at low energies, the user can reveal the finest details.

3D analysis

Thermo Scientific Auto Slice & View 5 (AS&V5) software is an optional tool that provides accurate target targeting and high-quality, multimodal subsurface and 3D information.

Precise sample navigation

It is tailored to specific application requirements thanks to the Thermo Scientific Nav-Cam camera placed inside the chamber, the high stability and accuracy of the 150 mm piezoelectric stage and the adaptability of the 110 mm stage.

Technical data

Source: Thermo Fisher Scientific – Electron Microscopy Solutions

Helios 5CX Helios 5UC Helios 5 UX
Ion optics Tomahawk HT ion column with excellent high current performance Phoenix ion column with excellent performance at high and low voltage
Ion beam current range 1 pA – 100 nA 1 pA – 65 nA
Accelerating voltage range 500V – 30kV 500V – 30kV
Max horizontal field width 0.9 mm at the beam convergence point 0.7 mm at the beam convergence point
Minimum source lifetime 1000 hours 1000 hours
Two-stage differential pumping

Time of flight (TOF) correction.

15-position aperture bar
Two-stage differential pumping

Time of flight (TOF) correction.

15-position aperture bar
Electron optics Ultra-high resolution Elstar field emission SEM column Elstar field emission SEM column with extreme high resolution
Magnetic immersion lens Magnetic immersion lens
Highly stable Schottky field emission gun providing stable, high resolution analytical currents Highly stable Schottky field emission gun providing stable, high resolution analytical currents
Electron beam resolution At optimal working distance (WD) 0.6 nm at 30 kV SHANK

0.6 nm at 15 kV

1.0 nm at 1 kV

0.9 nm at 1 kV with beam delay*
0.6 nm at 30 kV SHANK

0.7 nm at 1 kV

1.0 nm at 500 V (ICD)
At a convergent point 0.6 nm at 15 kV

1.5 nm at 1 kV with beam release* and DBS*
0.6 nm at 15 kV

1.2 nm at 1 kV
Electron beam parameter space Electron beam current range 0.8 pA to 176 nA 0.8 pA to 100 nA
Accelerating voltage range 200V – 30kV 350V – 30kV
Landing energy range 20 eV – 30 keV 20 eV – 30 keV
Maximum horizontal width of the field 2.3 mm at 4 mm WD 2.3 mm at 4 mm WD
Detectors Elstar SE/BSE intra-lens detector (TLD-SE, TLD-BSE)
Elstar SE/BSE column detector (ICD)*
Elstar Column BSE Detector (MD)*
Everhart-Tornley SE detector (ETD)
Infrared camera for viewing the sample/column
High performance intra-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE)*
Thermo Scientific chamber navigation camera for sample navigation*
Retractable, low-voltage, high-contrast, directional, solid-state backscatter (DBS) electron detector*
Retractable STEM 3+ detector with BF/DF/HAADF* segments
Integrated beam current measurement
Scene and sample Stage Flexible, 5-axis table with drive Precise, five-axis drive table with a piezoelectrically driven XYR axis
XY range 110mm 150mm
Z range 65mm 10mm
Rotation 360° (endless) 360° (endless)
Tilt range -15° to +90° -10° to +60°
Maximum sample height 85 mm clearance to the eucentric point 55 mm play to the eucentric point
Maximum sample weight 500 g in any stage position

Up to 5 kg at 0° inclination (some restrictions apply)
500 g (including sample holder)
Maximum sample size 110 mm at full rotation (larger samples possible with limited rotation) 150 mm at full rotation (larger samples possible with limited rotation)
Comcentric pan and tilt Comcentric pan and tilt

* Available as an option, depending on configuration